SS Vapor Vacuum

Available from Nilfisk Industrial Vacuums

The Nilfisk SS Vapor Vacuum captures toxic semiconductor gases and ultrafine particulate. An impregnated carbon filter cartridge captures and retains such toxic gases as arsine,phosphine and chlorinated solvent vapors (carbon tetrachloride and chloroform) released during the cleaning of semiconductor process equipment such as molecular beam epitaxy (MBE) chambers, ion implanters and plasma etching machines.

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